- CRYO PUMP CRYO PUMP
- SUPER TRAP SUPER TRAP
- REFRIGERATOR REFRIGERATOR
- LN2GENERATOR LN2 GENERATOR
- MAINTENANCE MAINTENANCE
- SUPPORT SUPPORT
- COMPANY COMPANY
- CAREERS CAREERS
Unlike the diffusion pump, the CRYO PUMP does not use oil.
Therefore, there is no need to install any trap to prevent the occurrence of oil back streaming.
The oil diffusion pump is susceptible to oil back streaming and contamination of the chamber due to oil backflow as it uses oil as the exhaust machine, which makes it inappropriate for a high-degree vacuum process.
The oil diffusion pump also features slow rates of exhaust machine as it requires a separate adapter with limited methods of attachment.
The CRYO PUMP features a cryogenic CRYO PANEL that exhaust machine all gas molecules simultaneously,
which ensures quick exhaust machine rates, and is able to maintain the vacuum in a clean state as the activation module is not exposed because oil is not used.
| Category | CRYO PUMP | Oil DIFFUSION PUMP |
|---|---|---|
| Pumping speed N2 (L/s) | 17,000 | 10,000 |
| Pumping speed H2 (L/s) | 25,000 | 19,520 |
| Pumping speed H2O (L/s) | 39,000 | 12,500 |
| Pumping speed performance of equivalent size | 2Double (average) | 1 (benchmark) |
| Power consumption of equivalent performance | 1 (benchmark) | 2~3times |
| Chamber installation direction | 360° | Vertical (90°) |
| Maintenance | Convenient | Difficult, Oil change every three months |
