라인업 VS TMP

FEATURE

Top-notch technological competencies proven by a variety of recorded tests
and experiments for up to 52-inch large pumps in addition to 4-30 inch products

CRYO PUMP

Most gas molecules (N2, Ar, etc.) that come into contact with the extremely low temperature (10~15K) CRYO PANEL, which is attached to the inner wall of the vacuum pump, turn into condensation. The molecules of gases with high equilibrium vapor pressure such as hydrogen and helium are adsorbed by activated carbon and removed. In the 80K SHIELD and BAFFLE, moisture that comprises most of what is contained inside the chamber turns into condensation, enhancing the purifying performance of CRYO PANEL.

It is able to create a clean vacuum of 10-7Pa (10-9Torr) or below. In addition, the quickly removes gases over a wide pressure range between 10-1Pa and 10-7Pa.

Advantages

  • Clean vacuum

  • Exhaust all gases

  • Fast pumpingspeed

  • Simple configuration
    and ease of use

  • Low maintenance cost

  • Freely attachment

Quick and clean vacuum thanks to the ability to exhaust all gases simultaneously without the use of oil

The CRYO PUMP removes all gas molecules simultaneously in cryogenic panels rapidly
and is able to maintain the vacuum in a clean state as it uses no oil.

  • CRYO PUMP Pumping

  • Simultaneous exhaust of all gases

Reduce cost and ease of maintenance

The CRYO PUMP creates a high-degree vacuum with only the CRYO PUMP.
Unlike other pumps, it does not require rough pumps and can save on power consumption costs by 20%-50% depending on the model due to its relatively lower power consumption.
It also features a compact design that makes it installable anywhere in the chamber with its design customizable to the different needs of customers.

Simple configuration, ease of use

The CRYO PUMP is comprised of a main body, He compressor and connection accessories only, making it compact and easy to use.

    VACCUM

    • VACUUM EVAPORATION

    • SPACE CHAMBER

    • SPUTTERING

    • ENCAPSULATION

    • ION INJECTION

    • ACCELERATOR

    • NUCLEAR FUSION

    • SURFACE ANALYSIS

    CRYOGENICS

    • NEW MATERIALS

    • FREEZING and CHILLING

    • MRI MEDICAL SERVICES

    • TRANSPORTATIONS

    • ENERGY

    • HIGH-SPEED TELECOMMUNICATIONS

    • AEROSPACE

    • BASIC PHYSICS

  • Sputter-Type : Optimized to purge air and H2, contributing to improvement of regenerative cycle, device operation rate and deposition quality.
  • L-Type : Features a compact design to facilitate installation in line with the customer's equipment structure
  • Bakeable-Type : Optimized to extremely high-degree vacuum
  • Rapid room temperature regeneration : Features a drastic cut in pump regeneration time, down to 1/3 the original time depending on the conditions
  • Corrosion-resistance PUMP : Enhanced corrosion resistance due to special surface coating inside the pump, excellent performance in various applications

  • L-Type

  • Sputter-Type

  • Bakeable-Type

  • Corrosion-resistance PUMP

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